White light interferometer for general purposes
NewView 8000 from Zygo
The NewView 8000 series of 3D optical surface profilers provide powerful versatility in non-contact optical surface profiling. All measurements are non-destructive, fast, and require no sample preparation. Advanced software tools characterize and quantify surface roughness, step heights, critical dimensions, and other topographical features, with excellent precision and accuracy. Integrated motorized zoom for NV8300.
|Scanning white light interferometer, 150 mm XY stage, man. filter tray and aperture stop|
|SureScan for height scans up to 40 mm, high slopes up to 86 deg,|
|Thin film thickness measurement >400nm|
|2D VisionPro software integrated|
|CSI ISO 25178 compliant|
Using Zygo's patented technology for coherence scanning interferometry (CSI), the NewView 8000 series of profilers easily measure a wide range of surface types, including smooth, rough, flat, sloped, and stepped. Profile heights can range from < 1 nm up to 20000 µm, at high speeds, independent of surface texture, magnification, or feature height. The NewView 8000 Series is offered in two configurations – a single zoom NewView 8200 configuration, and a triple zoom equipped NewView 8300 system.
Flatness and roughness from steel to optical surfaces
Fully automated white light interferometer with confocal properties to measure multiple tasks with one device. Easy-to-use Mx software to measure flatness, roughness, large steps, thin films, steep slopes, heights ranging from < 1 nm up to 20000 µm.
Thin transparent film
Non-contact CSI for institutes or labs to measure thin transparent films >1.5µm and substrate surface simultaneously
Steep slopes, cones
For non-specular surfaces, the theoretical limit can be exceeded in some cases by more than 50% due to the scattering structure of the surface. 45° slopes are possible to measure. Up to 60° or more on rough surfaces. Zygo patented oversampling mode is used for cones.